The theory of ion beam polishing and machining

Abstract The principles of wavefront propagation are employed to describe the evolution of surface topography during ion bombardment-induced sputtering erosion of solids. It is demonstrated that Huygen's wavelet or characteristics (ray) tracing methods are equally valid but that the former is preferable when multiple gradient discontinuities can develop on generally rough surfaces and the latter is preferable for more gently contoured surfaces. These concepts are elaborated in the contexts of surface polishing and macro- and micromachining and the tolerances achieved by approximation methods are evaluated.

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