The aerosol deposition method
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AD (aerosol deposition) method is one of newly developed technologies for spray coating powder materials. It is a revolutionary coating technology in which high-density consolidation of ceramic powder can be obtained at room temperature, without sintering at high temperature as in conventional ceramic formation. By using AD, it is expected to improve device performance, to greatly reduce energy consumption and to decrease the number of steps during fabrication process that ultimately result in cutting production costs. How the characteristics of AD method are positioned from the perspective of technological competitiveness and reduction of environment load, as well as its potential, is investigated from the viewpoint of Full Research, along with description of principles and specific case studies.
[1] Harumichi Sato,et al. High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O3 Thick Films Formed by Aerosol Deposition , 2005 .
[2] Jun Akedo,et al. Aerosol Deposition of Ceramic Thick Films at Room Temperature: Densification Mechanism of Ceramic Layers , 2006 .
[3] J. Akedo,et al. Annealing Effect on 0.5Pb(Ni1/3Nb2/3)O3-0.5Pb(Zr0.3Ti0.7)O3 Thick Film Deposited By Aerosol Deposition Method , 2005 .