Development and manufacturing of SPO X-ray mirrors

The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics enabling future X-ray observatories such as ATHENA. SPO is being developed at cosine together with the European Space Agency (ESA) and academic as well as industrial partners. The SPO modules are lightweight, yet stiff, high-resolution X-ray optics, allowing missions to reach a large effective area of several square meters. These properties of the optics are mainly linked to the mirror plates consisting of mono-crystalline silicon. Silicon is rigid, has a relatively low density, a very good thermal conductivity and excellent surface finish, both in terms of figure and surface roughness. For Athena, a large number of mirror plates is required, around 100,000 for the nominal configuration. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular shapes SPO mirror plates in high quality, large quantity and at low cost. Within the last years, several aspects of the SPO mirror plate have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. In view of flight model production, a second source of mirror plates has been added in addition to the first plate supplier. The paper will provide an overview of most recent plate design, metrology and production developments.