Fabrication of Ultra-Small-Diameter Optical-Fiber Probe Using Acid-Etch Technique and CO2 Laser for 3D-Micro Metrology
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[1] Richard K. Leach,et al. Development of a three-dimensional vibrating tactile probe for miniature CMMs , 2013 .
[2] E.J.C. Bos,et al. Aspects of tactile probing on the micro scale , 2011 .
[3] Akio Katsuki,et al. Study of a vibrating fiber probing system for 3-D micro-structures: performance improvement , 2014 .
[4] M. Tachikura,et al. Fusion mass-splices for optical fibers using high-frequency discharge , 1984 .
[5] Eiji Kondo,et al. Development of a system for measuring micro hole accuracy using an optical fiber probe , 2010 .
[6] R. Thalmann,et al. Novel 3D analogue probe with a small sphere and low measurement force , 2003 .
[7] Kimiyuki Mitsui,et al. Development of Three Dimensional Profile Measuring Apparatus for Microparts. Measuring Principle and Measuring Results. , 1998 .
[8] Hiroki Shimizu,et al. Property Evaluation of Eccentric Astigmatic Method to Apply Micro Tactile Probe , 2015, Int. J. Autom. Technol..
[9] S. Bütefisch,et al. Micromechanical three-axial tactile force sensor for micromaterial characterisation , 2001 .
[10] 公之 三井,et al. マイクロ部品の形状・寸法測定に関する研究 : 装置の改良ならびにプローブの校正と寸法測定結果(機械要素,潤滑,工作,生産管理など) , 2002 .
[12] Shinji Kasei,et al. Development of Optical Apparatus for Measuring Small Hole Diameter. , 1996 .
[13] Kimiyuki Mitsui,et al. Development of Measurement Method for Shape and Dimension of Micro-Components , 2004 .
[14] Heinrich Schwenke,et al. Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines , 2001 .
[15] Andrew Lewis. Fully traceable miniature CMM with submicrometer uncertainty , 2003, SPIE Optics + Photonics.
[16] Wolfgang Knapp,et al. New concept of a 3D-probing system for micro-components , 2010 .
[17] Hiroshi Murakami,et al. Development of Touch Probing System Using a Fiber Stylus , 2016 .
[18] John R. Stoup,et al. Fiber deflection probe for small hole metrology , 2006 .
[19] Kazuhiko Takahashi,et al. A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits , 2016 .
[20] K. Hidaka,et al. Study of a micro-roughness probe with ultrasonic sensor , 2008 .
[21] Takahisa Masuzawa,et al. Vibroscanning Method for Nondestructive Measurement of Small Holes , 1993 .
[22] M. Kaiser,et al. A probe for the measurement of diameters and form errors of small holes , 1998 .
[23] Richard K. Leach,et al. Three-dimensional characterisation of a novel vibrating tactile probe for miniature CMMs. , 2013 .
[24] P.H.J. Schellekens,et al. Study of a Small-sized Ultrasonic Probe , 2006 .
[25] Yuichi Okazaki,et al. Development of Micro Contact Detection Probe for Microhole Quality Control , 2011, Int. J. Autom. Technol..
[26] WO Wouter Pril,et al. Development of high precision mechanical probes for coordinate measuring machines , 2002 .
[27] Yasuhiro Takaya,et al. Development of the nano-probe system based on the laser-trapping technique , 2008 .
[28] K. Fan,et al. A long-stroke 3D contact scanning probe for micro/nano coordinate measuring machine , 2016 .
[29] Nobuyuki Akiyama,et al. Development of Optical Measuring Equipment for Diameter of Small and Deep Hole. , 1996 .
[30] Martin Hoffmann,et al. Design and characterization of a resonant triaxial microprobe , 2015 .
[31] Hiromichi Onikura,et al. Development of an Optical Hole-Diameter Measuring Instrument: Optical Analysis, Fundamental Experiment, Trial Manufacture and Performance Test , 1995 .
[32] Yasuhiro Takaya,et al. Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle , 2011, Int. J. Autom. Technol..
[33] Takahisa Masuzawa,et al. Twin-Probe Vibroscanning Method for Dimensional Measurement of Microholes , 1997 .
[34] Robert J. Hocken,et al. Development of a virtual probe tip with an application to high aspect ratio microscale features , 2005 .