A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer
暂无分享,去创建一个
Jia Wei | Guo Qi Zhang | Andre Bossche | Guo Qi Zhang | Duco Bosma | Ernst J. R. Sudhölter | Louis C. P. M. de Smet | M. R. Venkatesh | Manjunath R. Venkatesh | Sumit Sachdeva | Brahim El Mansouri | E. Sudhölter | A. Bossche | Duco Bosma | L. D. Smet | Jia Wei | S. Sachdeva | B. E. Mansouri
[1] Ming Qin,et al. A Fully Packaged CMOS Interdigital Capacitive Humidity Sensor With Polysilicon Heaters , 2011, IEEE Sensors Journal.
[2] C. Sarkar,et al. High Dynamic Range Methanol Sensor Based on Aligned ZnO Nanorods , 2013, IEEE Sensors Journal.
[3] Robert Blue,et al. Chemicapacitors as a versatile platform for miniature gas and vapor sensors , 2017 .
[4] A. Fletcher,et al. Adsorption of gases and vapors on nanoporous Ni2(4,4'-Bipyridine)3(NO3)4 metal-organic framework materials templated with methanol and ethanol: structural effects in adsorption kinetics. , 2004, Journal of the American Chemical Society.
[5] Guo Qi Zhang,et al. Sensitive and Reversible Detection of Methanol and Water Vapor by In Situ Electrochemically Grown CuBTC MOFs on Interdigitated Electrodes. , 2017, Small.
[6] R. Igreja,et al. Analytical evaluation of the interdigital electrodes capacitance for a multi-layered structure , 2004 .
[7] Kensall D. Wise,et al. A high-speed capacitive humidity sensor with on-chip thermal reset , 2000 .
[8] Omar K Farha,et al. Metal-organic framework materials as chemical sensors. , 2012, Chemical reviews.
[9] Sangmin Jeon,et al. Adsorption and desorption characteristics of alcohol vapors on a nanoporous ZIF-8 film investigated using silicon microcantilevers. , 2015, Chemical communications.
[10] Hui Li,et al. Detection of ethanol and methanol vapors using polymer-coated piezoresistive Si bridge , 2011 .
[11] E. Obermeier,et al. A capacitive CO2 sensor with on-chip heating , 1995 .
[12] S. Zeinali,et al. Design and fabrication of capacitive nanosensor based on MOF nanoparticles as sensing layer for VOCs detection , 2016 .
[13] S. Morgan,et al. Highly sensitive volatile organic compounds vapour measurements using a long period grating optical fibre sensor coated with metal organic framework ZIF-8 , 2018 .
[14] Chongli Zhong,et al. Effect of temperature on gas adsorption and separation in ZIF-8: A combined experimental and molecular simulation study , 2011 .
[15] Valeria Toffoli,et al. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis , 2013, Sensors.
[16] E. Sudhölter,et al. Water-enhanced guarding of polymer-coated IDE platforms as a key mechanism for achieving response immunity towards parasitic coupling events , 2015 .
[17] E. Saiz,et al. Metal-Organic Framework ZIF-8 Films As Low-κ Dielectrics in Microelectronics , 2013 .
[18] Michael G. Campbell,et al. Metal–Organic Frameworks as Active Materials in Electronic Sensor Devices , 2017, Sensors.
[19] Jungkyu Choi,et al. Thermal stability of ZIF-8 under oxidative and inert environments: A practical perspective on using ZIF-8 as a catalyst support , 2015 .
[20] Gérard Férey,et al. Adsorption properties in high optical quality nanoZIF-8 thin films with tunable thickness , 2010 .
[21] Mircea Dincă,et al. Chemiresistive Sensor Arrays from Conductive 2D Metal-Organic Frameworks. , 2015, Journal of the American Chemical Society.
[22] Ryan P. Lively,et al. Investigating the Intrinsic Ethanol/Water Separation Capability of ZIF-8: An Adsorption and Diffusion Study , 2013 .
[23] Jaehwa Jeong,et al. Dielectric properties of on-chip-cured polyimide films , 2010 .
[24] Guang Lu,et al. Metal-organic frameworks as sensors: a ZIF-8 based Fabry-Pérot device as a selective sensor for chemical vapors and gases. , 2010, Journal of the American Chemical Society.
[26] Xiao-Ming Chen,et al. Ligand-directed strategy for zeolite-type metal-organic frameworks: zinc(II) imidazolates with unusual zeolitic topologies. , 2006, Angewandte Chemie.
[27] Pasqualina M. Sarro,et al. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture , 2010 .
[28] M. Fröba,et al. Graphene-like metal–organic frameworks: morphology control, optimization of thin film electrical conductivity and fast sensing applications , 2018 .
[29] Min Xiong,et al. Rhombic Dodecahedron ZIF-8 Precursor: Designing Porous N-Doped Carbon for Sodium-Ion Batteries , 2017 .
[30] Giovanni Neri,et al. Detection of hazardous volatile organic compounds (VOCs) by metal oxide nanostructures-based gas sensors: A review , 2016 .
[31] M. R. Venkatesh,et al. Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications , 2016, 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).
[32] Pasqualina M. Sarro,et al. Microhotplates with TiN heaters , 2008 .
[33] Klaus Huber,et al. Controlling Zeolitic Imidazolate Framework Nano- and Microcrystal Formation: Insight into Crystal Growth by Time-Resolved In Situ Static Light Scattering , 2011 .
[34] L. Balan,et al. Controlling ZIF-8 nano and microcrystal formation and reactivity through zinc salts variations , 2013 .
[35] Piero Malcovati,et al. Capacitance Humidity Micro-sensor with Temperature Controller and Heater Integrated in CMOS Technology , 2016, Sensors.
[36] Ralph P. Tatam,et al. Optical fibre long period grating gas sensor modified with metal organic framework thin films , 2015 .
[37] K. Mirica,et al. Conductive two-dimensional metal-organic frameworks as multifunctional materials. , 2018, Chemical communications.
[38] M. Khraisheh,et al. Kinetics of CO2 Adsorption/Desorption of Polyethyleneimine‐Mesoporous Silica , 2017 .
[39] K. Rajanna,et al. Copper (II) oxide thin film for methanol and ethanol sensing , 2011 .
[40] Lallan Yadava,et al. Sensing properties of CdS-doped tin oxide thick film gas sensor , 2010 .
[41] H. Noguchi,et al. Gas Adsorption Mechanism and Kinetics of an Elastic Layer-Structured Metal–Organic Framework , 2012 .
[42] P. Bhattacharyya,et al. Technological Journey Towards Reliable Microheater Development for MEMS Gas Sensors: A Review , 2014, IEEE Transactions on Device and Materials Reliability.
[43] E. Sudhölter,et al. Gas Phase Sensing of Alcohols by Metal Organic Framework–Polymer Composite Materials , 2017, ACS applied materials & interfaces.
[44] Binling Chen,et al. Zeolitic imidazolate framework materials: recent progress in synthesis and applications , 2014 .
[45] M. Barzegar,et al. Sensing behavior of flower-shaped MoS2 nanoflakes: case study with methanol and xylene , 2018, Beilstein journal of nanotechnology.
[46] Hanns-Erik Endres,et al. A capacitive CO2 sensor system with suppression of the humidity interference , 1999 .