Polarizing mirror/absorber for visible wavelengths based on a silicon subwavelength grating: design and fabrication.

A one-dimensional 280-nm period silicon grating designed to exhibitpolarization-dependent reflection or antireflection behavior at visiblewavelengths has been fabricated and tested. For normally incident575-nm light, this grating reflects less than 3% of the incidentradiation polarized perpendicular to the grating grooves andapproximately 23% of the orthogonal polarization. To demonstratethe grating's broadband characteristics, reflectance measurements arepresented over the free-space wavelength range 475 nm < lambda(0) < 800 nm, for angles of incidence in the range 0 degrees < theta < 40 degrees , for polarization parallel and perpendicular to thegrating grooves, and for planes of incidence parallel and perpendicularto the grooves. A description of the fabrication process is alsogiven.

[1]  R. Kostuk,et al.  Lamellar gratings as polarization components for specularly reflected beams , 1993 .

[2]  Anthony L. Lentine,et al.  A complexity analysis of smart pixel switching nodes for photonic extended generalized shuffle switching networks , 1993 .

[3]  Henry I. Smith,et al.  Holographic lithography with thick photoresist , 1983 .

[4]  Stephen Y. Chou,et al.  Fabrication and performance of thin amorphous Si subwavelength transmission grating for controlling vertical cavity surface emitting laser polarization , 1996 .

[5]  N Streibl,et al.  Holographic quarterwave plates. , 1990, Applied optics.

[6]  A. Friesem,et al.  Computer-generated relief gratings as space-variant polarization elements. , 1992, Optics letters.

[7]  B K Jenkins,et al.  Passive optical interconnection network employing a shuffle-exchange topology. , 1994, Applied optics.

[8]  A. Accard,et al.  Grating fabrication and characterization method for wafers up to 2 in , 1994 .

[9]  Tsukasa Yamashita,et al.  Grating beam splitting polarizer using multilayer resist method , 1991, Optics & Photonics.

[10]  M A Karim,et al.  Butterfly interconnection network: design of multiplier, flip-flop, and shift register. , 1994, Applied optics.

[11]  Ashok V. Krishnamoorthy,et al.  A prototype 3D optically interconnected neural network , 1994 .

[12]  S. K. Case,et al.  High-frequency holographic transmission gratings in photoresist , 1983 .

[13]  K H Brenner,et al.  Optical implementations of the perfect shuffle interconnection. , 1988, Applied optics.

[14]  T J Cloonan,et al.  Self-routing crossbar packet switch employing free-space optics for chip-to-chip Interconnections. , 1991, Applied optics.

[15]  L. H. Tanner,et al.  A study of the surface parameters of ground and lapped metal surfaces, using specular and diffuse reflection of laser light , 1976 .

[16]  T K Gaylord,et al.  Homogeneous layer models for high-spatial-frequency dielectric surface-relief gratings: conical diffraction and antireflection designs. , 1994, Applied optics.

[17]  T Yatagai,et al.  Reversal-input superposing technique for all-optical neural networks. , 1994, Applied optics.

[18]  G. A. Vawter,et al.  Polarization-sensitive subwavelength antireflection surfaces on a semiconductor for 975 nm. , 1996, Optics letters.

[19]  Anthony L. Lentine,et al.  Free-space digital optical systems , 1994 .

[20]  T K Gaylord,et al.  Zero-reflectivity homogeneous layers and high spatialfrequency surface-reliefgratings on lossy materials. , 1987, Applied optics.

[21]  Giuseppe A. De Biase.  Optical multistage interconnection networks for large-scale multiprocessor systems , 1988 .

[22]  D. Flanders.  Submicrometer periodicity gratings as artificial anisotropic dielectrics , 1983 .

[23]  T K Gaylord,et al.  High-spatial-frequency binary and multilevel stairstep gratings: polarization-selective mirrors and broadband antireflection surfaces. , 1992, Applied optics.

[24]  S. K. Case,et al.  Optical elements with ultrahigh spatial-frequency surface corrugations. , 1983, Applied optics.

[25]  Y. Fainman,et al.  Design, fabrication, and characterization of form-birefringent multilayer polarizing beam splitter , 1997 .

[26]  P. Lalanne,et al.  Highly improved convergence of the coupled-wave method for TM polarization and conical mountings , 1996, Diffractive Optics and Micro-Optics.

[27]  G. M. Morris,et al.  Antireflection structured surfaces for the infrared spectral region. , 1993, Applied optics.

[28]  Jun Tanida,et al.  P-OPALS: pure optical-parallel array logic system , 1994 .

[29]  Philippe Lalanne,et al.  Depth dependence of the effective properties of subwavelength gratings , 1997 .

[30]  David L. Brundrett,et al.  Subwavelength transmission grating retarders for use at 10.6 μm. , 1996, Applied optics.

[31]  Olof Bryngdahl,et al.  Phase gratings with subwavelength structures , 1995 .

[32]  T. Gaylord,et al.  Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings , 1995 .

[33]  T K Gaylord,et al.  Antireflection gold surface-relief gratings: experimental characteristics. , 1988, Applied optics.

[34]  O. Bryngdahl,et al.  Gratings in the resonance domain as polarizing beam splitters. , 1995, Optics letters.

[35]  Henry I. Smith,et al.  Transmission grating spectroscopy and the Advanced X-Ray Astrophysics Facility , 1991 .

[36]  K. Johnson,et al.  Optical interconnection network using polarization-based ferroelectric liquid crystal gates. , 1988, Applied optics.

[37]  Raymond K. Kostuk,et al.  Effective-medium theory of zeroth-order lamellar gratings in conical mountings , 1993 .