Thin-film microsystem applicable in (bio)chemical sensors

Abstract A strip thin-film microsystem based on the silicon diaphragm or glass substrate, thin-film heater and planar interdigital array of electrodes has been developed. The used thin-film and silicon micromachining technologies are compatible with microelectronics IC technologies which allow a further development towards smart sensors. Description of some possible applications of thin-film microsystem is presented: (i) gas-resistance sensor; (ii) electrochemical voltammetric sensor, and (iii) biosensor based on the supported bilayer lipid membranes. The last one is presented in more details because the lipid bilayers seem to be the attractive candidates for biosensors applications.