Demonstration of a Process-Independent Run-to-Run Controller

A process-independent generic cell controller (GCC) has been developed as a part of a supervisory control framework for semiconductor manufacturing processes. It can function in a hybrid, dynamic process environment where facility structure, networks, controllers, equipment, products, and operations are constantly changing. The GCC is designed primarily as a run-to-run (R2R) controller that can be controlled by inter-process factory controllers, can incorporate real-time controllers, and is currently being adapted for transfer to industry. A GCC implementation has performed optimization and control of plasma etching and chemical-mechanical planarization, illustrating process independence.