Integrated nanotube circuits: Controlled growth and ohmic contacting of single-walled carbon nanotubes

Single-walled carbon nanotubes are synthesized by chemical vapor deposition of methane at controlled locations on a substrate using patterned catalytic islands. The combined synthesis and microfabrication technique presented here allows a large number of ohmically contacted nanotube devices with controllable length to be placed on a single substrate. Transport studies demonstrate ohmic contacting, giving two-terminal resistances as low as 20 kΩ at low temperatures.

[1]  White,et al.  Are fullerene tubules metallic? , 1992, Physical review letters.

[2]  Sawada,et al.  New one-dimensional conductors: Graphitic microtubules. , 1992, Physical review letters.

[3]  Riichiro Saito,et al.  Electronic structure of chiral graphene tubules , 1992 .

[4]  L. B. Ebert.  Science of fullerenes and carbon nanotubes , 1996 .

[5]  Benedict,et al.  Pure carbon nanoscale devices: Nanotube heterojunctions. , 1996, Physical review letters.

[6]  H. Dai,et al.  Individual single-wall carbon nanotubes as quantum wires , 1997, Nature.

[7]  Leon Balents,et al.  COULOMB INTERACTIONS AND MESOSCOPIC EFFECTS IN CARBON NANOTUBES , 1997 .

[8]  E. J. Mele,et al.  Size, Shape, and Low Energy Electronic Structure of Carbon Nanotubes , 1997 .

[9]  Paul L. McEuen,et al.  Single-Electron Transport in Ropes of Carbon Nanotubes , 1997, Science.

[10]  T. N. Todorov,et al.  Carbon nanotubes as long ballistic conductors , 1998, Nature.

[11]  E. J. Mele,et al.  Temperature-dependent resistivity of single-wall carbon nanotubes , 1997, cond-mat/9704117.

[12]  S. Tans,et al.  Room-temperature transistor based on a single carbon nanotube , 1998, Nature.

[13]  Alan M. Cassell,et al.  Chemical vapor deposition of methane for single-walled carbon nanotubes , 1998 .

[14]  Herbert Shea,et al.  Single- and multi-wall carbon nanotube field-effect transistors , 1998 .

[15]  Alan M. Cassell,et al.  Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers , 1998, Nature.

[16]  A. Rinzler,et al.  Electronic structure of atomically resolved carbon nanotubes , 1998, Nature.

[17]  C. Lieber,et al.  Atomic structure and electronic properties of single-walled carbon nanotubes , 1998, Nature.