Strategy for the breakthrough of RLS trade-off relationship in the development of novel resist materials and a developer

We developed novel resist materials and developer with fluorine atoms. Fluorine expected to show higher absorption coefficient than carbon because of its higher atomic number. From QCM, GPC, and SEM evaluation, it was found that ZEP-Y1 and ZEP-Y2 have a potential for next generation resist materials. The combination of resist material including fluorine atoms and fluorine solution is promising. This study showed the possibility of the extension of range for resist materials and developers.