Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices

1 Department of Condensed Matter Physics, (DPMC), University of Geneva, 24 Quai Ernest-Ansermet, 1211 Geneva 4, Switzerland 2 Dipartimento di Scienze Fisiche & CNR-SPIN, Università degli Studi di Napoli Federico II, Complesso Universitario di Monte S. Angelo, Via Cintia, 80126 Napoli, Italy 3 The Sensors, Actuators and Microsystems Laboratory, Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Rue Jaquet-Droz 1, P.O. Box 526, 2002 Neuchâtel, Switzerland 4 Laboratoire de Physique des Solides, Université Paris-Sud, CNRS-UMR 8502, 91405 Orsay, France 5 Department of Applied Physics, Yale University, P.O. Box 208284, New Haven, CT 06520-8284, USA

[1]  Aaas News,et al.  Book Reviews , 1893, Buffalo Medical and Surgical Journal.

[2]  P. McIntyre,et al.  Mobile Ferroelastic Domain Walls in Nanocrystalline PZT Films: the Direct Piezoelectric Effect , 2011 .

[3]  Danick Briand,et al.  The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film , 2011 .

[4]  O. Stéphan,et al.  Enhanced critical temperature in epitaxial ferroelectric Pb(Zr0.2Ti0.8)O3 thin films on silicon , 2011 .

[5]  K. Garrity,et al.  Crystalline Oxides on Silicon , 2010, Advanced materials.

[6]  M. Frank,et al.  Domain dynamics in epitaxial Pb(Zr0.2Ti0.8)O3 films studied by piezoelectric force microscopy , 2010 .

[7]  Hideaki Adachi,et al.  Vibration energy harvesting using highly (001)-oriented Pb(Zr,Ti)O3 thin film , 2010 .

[8]  D. Briand,et al.  Epitaxial piezoelectric MEMS on silicon , 2010 .

[9]  Paul Muralt,et al.  Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting , 2009 .

[10]  Paul K. Wright,et al.  Modeling, fabrication and stress compensation of an epitaxial thin film piezoelectric microscale energy scavenging device , 2009 .

[11]  Y. V. Andel,et al.  Vibration energy harvesting with aluminum nitride-based piezoelectric devices , 2009 .

[12]  C. K. Lee,et al.  Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film , 2009 .

[13]  K. Saito,et al.  Impact of 90°-Domain Wall Motion in Pb(Zr0.43Ti0.57)O3 Film on the Ferroelectricity Induced by an Applied Electric Field , 2009 .

[14]  C. Ahn,et al.  Role of strontium in oxide epitaxy on silicon (001). , 2008, Physical review letters.

[15]  H. Wikle,et al.  The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting , 2008 .

[16]  Eric M. Yeatman,et al.  Performance limits of the three MEMS inertial energy generator transduction types , 2007 .

[17]  Chang-Beom Eom,et al.  Strain Tuning of Ferroelectric Thin Films , 2007 .

[18]  Henry A. Sodano,et al.  A review of power harvesting using piezoelectric materials (2003–2006) , 2007 .

[19]  Nazanin Bassiri-Gharb,et al.  Domain wall contributions to the properties of piezoelectric thin films , 2007 .

[20]  S. Beeby,et al.  Energy harvesting vibration sources for microsystems applications , 2006 .

[21]  Lu Dong,et al.  Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting , 2006, Microelectron. J..

[22]  S. Gevorgian,et al.  Ferroelectric thin films: Review of materials, properties, and applications , 2006 .

[23]  M. Alexe,et al.  Increased ferroelastic domain mobility in ferroelectric thin films and its use in nano-patterned capacitors , 2006 .

[24]  D. Starodub,et al.  Interface structure and thermal stability of epitaxial SrTiO3 thin films on Si (001) , 2006 .

[25]  C. Rossel,et al.  Solid phase epitaxy of SrTiO3 on (Ba,Sr)O∕Si(100): The relationship between oxygen stoichiometry and interface stability , 2006 .

[26]  M. Alexe,et al.  Intrinsic Ferroelectric Properties of Strained Tetragonal PbZr0.2Ti0.8O3 Obtained on Layer–by–Layer Grown, Defect–Free Single–Crystalline Films , 2006, cond-mat/0601335.

[27]  Sang-Gook Kim,et al.  MEMS power generator with transverse mode thin film PZT , 2005 .

[28]  K. Rabe,et al.  Physics of thin-film ferroelectric oxides , 2005, cond-mat/0503372.

[29]  P. Wright,et al.  A piezoelectric vibration based generator for wireless electronics , 2004 .

[30]  Hao Li,et al.  Advances in heteroepitaxy of oxides on silicon , 2004 .

[31]  J. Lettieri,et al.  Critical issues in the heteroepitaxial growth of alkaline-earth oxides on silicon , 2002 .

[32]  R. Droopad,et al.  Direct observation of atomic disordering at the SrTiO3/Si interface due to oxygen diffusion , 2002 .

[33]  Dong Suk Shin,et al.  Characteristics of Pt/SrTiO3/Pb(Zr0.52, Ti0.48)O3/SrTiO3/Si ferroelectric gate oxide structure , 1999 .

[34]  R. Mckee,et al.  Crystalline Oxides on Silicon: The First Five Monolayers , 1998 .

[35]  M. Morris.  The Design , 1998, The Graphic Design Process.

[36]  A. Tagantsev,et al.  Effect of mechanical boundary conditions on phase diagrams of epitaxial ferroelectric thin films , 1998 .

[37]  Paul Muralt,et al.  Piezoelectric thin films for MEMS , 1997, Applied Physics Letters.

[38]  E. Tokumitsu,et al.  Crystalline Quality and Electrical Properties of PbZrxTi1-xO3 Thin Films Prepared on SrTiO3-Covered Si Substrates , 1995 .

[39]  James S. Speck,et al.  DOMAIN CONFIGURATIONS DUE TO MULTIPLE MISFIT RELAXATION MECHANISMS IN EPITAXIAL FERROELECTRIC THIN FILMS. I: THEORY , 1994 .

[40]  Budai,et al.  Domain formation and strain relaxation in epitaxial ferroelectric heterostructures. , 1994, Physical review. B, Condensed matter.

[41]  M. Omizo,et al.  Modeling , 1983, Encyclopedic Dictionary of Archaeology.

[42]  W. Marsden.  I and J , 2012 .

[43]  S. Trolier-McKinstry,et al.  Thin Film Piezoelectrics for MEMS , 2004 .

[44]  J. Melngailis,et al.  Dynamics of ferroelastic domains in ferroelectric thin films , 2003, Nature materials.

[45]  W. J. Merz.  Piezoelectric Ceramics , 1972, Nature.