New micro stereo lithography for freely movable 3D micro structure-super IH process with submicron resolution

We have developed a drastically advanced micro stereo lithography named "Super IH process". It is the most unique feature of this process that liquid UV (Ultra Violet) polymer can be solidified at a pinpoint position in 3D space by optimizing apparatus and focusing condition of the laser beam. This pinpoint exposure enables us to make real 3D micro structure without any support parts nor sacrificial layers. Therefore freely movable micro mechanism such as gear rotators and free connected chains can be made easily. Moreover, several problems which conventional micro stereo lithography has are completely solved. Submicron fabrication resolution has first achieved by simple desk top apparatus. Since total fabrication time of the super IH process is extremely fast, it is easy to apply to mass productive 3D micro fabrication process.

[1]  Koji Ikuta,et al.  Biochemical IC chip toward cell free DNA protein synthesis , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[2]  Koji Ikuta,et al.  Development of mass productive micro stereo lithography (Mass-IH process) , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[3]  K. Ikuta,et al.  Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[4]  K. Ikuta,et al.  Real three dimensional micro fabrication using stereo lithography and metal molding , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[5]  S. Kawata,et al.  Two-photon-absorbed photopolymerization for three-dimensional microfabrication , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.