论文信息 - Characterization and Design of Quartz Rate Sensors

Characterization and Design of Quartz Rate Sensors

The BEI Systron Donner’s quartz rate sensor (QRS) uses double-ended quartz tuning fork to sense angular rate. The drive fork, acting as a Coriolis sensor, is coupled to a similar fork as a pickup to produce the rate output signal. In this paper, the theoretical analysis of the quartz fork model is presented. Following that, FEA analysis results are discussed. The consideration to optimize fork design is detailed. Experiments from mechanical testing and electrical testing are presented to show the improvement of the fork design.Copyright © 2005 by ASME

Frank Wang | Marc Smith

[1] Sunil A. Bhave,et al. ΣΔ capacitive interface for a vertically-driven XaY-axis rate gyroscope , 2002 .

[2] L. E. Costlow,et al. Common design techniques for BEI GyroChip quartz rate sensors for both automotive and aerospace/defense markets , 2003 .

[3] B. Boser,et al. A monolithic surface micromachined Z-axis gyroscope with digital output , 2000, 2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No.00CH37103).