论文信息 - Study of spatial distributions of F, H and CF2 radicals in DF CCP discharge in Ar/CF4 and Ar/CHF3 mixtures - 字舞流文

Study of spatial distributions of F, H and CF2 radicals in DF CCP discharge in Ar/CF4 and Ar/CHF3 mixtures

O. V. Braginsky | S. Zyryanov | A. Rakhimov | A. Kovalev | D. Lopaev | T. Rakhimova | O. Braginsky | A. Vasilieva