Metal Oxide Nanomaterials for Chemical Sensors

Since the development of the first models of gas detection on metaloxide-based sensors much effort has been made to describe the mechanism responsible for gas sensing. Despite progress in recent years, a number of key issues remain the subject of controversy; for example, the disagreement between the results of electrophysical and spectroscopic characterization, as well as the lack of proven mechanistic description of surface reactions involved in gas sensing. In the present chapter the basics as well as the main problems and unresolved issues associated with the chemical aspects of gas sensing mechanism in chemiresistors based on semiconducting metal oxides are addressed. ‘‘Sensors have a ‘life cycle’ consisting of preparation, activation, operation with deactivation and, possible, regeneration. Thus understanding the performance in terms of reaction and conductance mechanisms is only a part of the total understanding of a sensor.’’ Dieter Kohl, Sensors and Actuators 1989, 18, 71. A. Gurlo (&) Fachbereich Materialund Geowissenschaften, Technische Universitaet Darmstadt, Darmstadt, Germany e-mail: gurlo@materials.tu-darmstadt.de M. A. Carpenter et al. (eds.), Metal Oxide Nanomaterials for Chemical Sensors, Integrated Analytical Systems, DOI: 10.1007/978-1-4614-5395-6_1, Springer Science+Business Media New York 2013 3 1.1 Chemiresistors: From Semiconductor Surfaces to Gas Detectors Since the early 1920s numerous investigations have demonstrated the influence of the gas atmosphere on conductivity, free carrier mobility, surface potential, and work function on a number of semiconductors (see summary of early works in [1– 13]). This led to the understanding that the surface of semiconductors is highly sensitive to chemical reactions and chemisorptive processes [3, 14–20] and resulted finally in the ‘‘theory of surface traps’’ (Brattain and Bardeen [21]), ‘‘boundary layer theory of chemisorption’’ [10, 22, 23] (Engell, Hauffe and Schottky) and ‘‘electron theory of chemisorption and catalysis on semiconductors’’ (Wolkenstein [5–7, 24]). They laid also the theoretical foundations for the subsequent development of metal-oxide-based gas sensors. Although from this understanding to the use of semiconductors as gas sensors ‘‘was, in principle, a small step’’ [25], the idea of using the changes in conductivity of a semiconducting metal oxide for gas detection was not conceived until the middle of the 1950s. The earliest written evidence came in 1956, in the Diploma Thesis performed in Erlangen under supervision of Mollwo and Heiland and entitled ‘‘Oxygen detection in gases changes in the conductivity of a semiconductor (ZnO)’’ [26], the results discussed later in [1, 27]: ‘‘If one exposes a zinc oxide layer which has been given a previous heating at 500 K in a high vacuum to oxygen at a constant pressure, the conductivity falls very rapidly initially and more slowly later. If one then increases the oxygen pressure suddenly, the current of the conductivity exhibits a kink when plotted as a function of the time. In this change the slopes immediately before and immediately after the kink point are proportional to the partial pressure of oxygen. One can use this effect to relate a known and an unknown concentration of oxygen often even under conditions in which one has a mixture of gases...’’ (cited from Ref. [1]). In 1957, Heiland showed that the ‘‘well-conducting surface layer on zinc oxide crystals provides a new, very sensitive test for atomic hydrogen’’ [28] and Myasnikov demonstrated that ZnO films can be used as a highly-sensitive oxygen-analyzer [29]. Later he developed this ‘‘to the method of semicondutor probes’’, which allows for ‘‘studying free radical processes’’ and for detecting ‘‘free active particles and to measure their concentration under stationary and non-stationary conditions in gases and liquids’’ [30]. However, the conditions under which ZnO was able to operate as a ‘‘sensing device’’ were far from the real ambient conditions (and, accordingly, from a practical application); the ‘‘sensitive’’ effects were observed: (i) in vacuum conditions, exposed to oxygen or hydrogen, (ii) after ‘‘activation’’ or ‘‘sensitization’’ of the surface by heating in H2 and in UHV. The practical use of metal-oxide-based gas sensors in normal ambient conditions was not considered until 1962, when Seiyama et al. reported that a ZnO film can be used as a detector of inflammable gases in air [31] (see also [32]), and Taguchi claimed that a sintered SnO2 block can also work in the same way [33] (for the history of TGS (Taguchi Gas Sensor) sensors, see [34]). The latter 4 A. Gurlo

[1]  Structural and CO sensing characteristics of Ti-added SnO2 thin films , 2002 .

[2]  Kong,et al.  Nanotube molecular wires as chemical sensors , 2000, Science.

[3]  S. Thevuthasan,et al.  Growth and structure of epitaxial CeO2 by oxygen-plasma-assisted molecular beam epitaxy , 1999 .

[4]  Mohieddine Benammar,et al.  Techniques for measurement of oxygen and air-to-fuel ratio using zirconia sensors. A review , 1994 .

[5]  박경수,et al.  Highly Conductive Coaxial SnO2-In2O3 Heterostructured Nanowires for Li Ion Battery Electrodes , 2007 .

[6]  Gyu-Tae Kim,et al.  Synthesis and gas sensing characteristics of highly crystalline ZnO–SnO2 core–shell nanowires , 2010 .

[7]  J. Gardner A non-linear diffusion-reaction model of electrical conduction in semiconductor gas sensors , 1990 .

[8]  Noboru Yamazoe,et al.  Interactions of tin oxide surface with O2, H2O AND H2 , 1979 .

[9]  U. Lampe,et al.  High temperature oxygen sensor based on sputtered cerium oxide , 1995 .

[10]  S. Seal,et al.  Nanocrystalline SnO gas sensors in view of surface reactions and modifications , 2002 .

[11]  E. Traversa,et al.  Design of Electroceramics for Solid Oxides Fuel Cell Applications: Playing with Ceria , 2008 .

[12]  M. Oliver,et al.  Structural, electrical, and optical properties of reactively sputtered SnO2 thin films , 2010 .

[13]  M. Engelhard,et al.  Influence of samaria doping on the resistance of ceria thin films and its implications to the planar oxygen sensing devices , 2009 .

[14]  B. Johansson,et al.  Optimization of ionic conductivity in doped ceria. , 2006, Proceedings of the National Academy of Sciences of the United States of America.

[15]  M. Engelhard,et al.  Conductivity of Oriented Samaria-Doped Ceria Thin Films Grown by Oxygen-plasma-assisted Molecular Beam Epitaxy , 2008 .

[16]  Chern.,et al.  Growth and structural characterization of Fe3O4 and NiO thin films and superlattices grown by oxygen-plasma-assisted molecular-beam epitaxy. , 1992, Physical review. B, Condensed matter.

[17]  Theodor Doll,et al.  Molecular beam evaporation-grown indium oxide and indium aluminium films for low-temperature gas sensors , 2000 .

[18]  R. Cavicchi,et al.  Role of initial conductance and gas pressure on the conductance response of single‐crystal SnO2 thin films to H2, O2, and CO , 1993 .

[19]  Hermann Dietz,et al.  Gas-diffusion-controlled solid-electrolyte oxygen sensors , 1982 .

[20]  S. Chambers,et al.  Growth and structure of MBE grown TiO2 anatase films with rutile nano-crystallites , 2007 .

[21]  K. Tsukada,et al.  Development of catheter-type optical oxygen sensor and applications to bioinstrumentation. , 2003, Biosensors & bioelectronics.

[22]  Seong‐Hyeon Hong,et al.  Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations , 2010 .

[23]  N. Yamazoe,et al.  Oxide Semiconductor Gas Sensors , 2003 .

[24]  Li Zhang,et al.  Rapid synthesis of ZnO nano-rods by one-step, room-temperature, solid-state reaction and their gas-sensing properties , 2006 .

[25]  I. L. Morgan,et al.  SIMNRA, a Simulation Program for the Analysis of NRA, RBS and ERDA , 2005 .

[26]  Giorgio Sberveglieri,et al.  Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts , 2002 .

[27]  J. Suehle,et al.  In situ conductivity characterization of oxide thin film growth phenomena on microhotplates , 1998 .

[28]  Yang Gao,et al.  Heteroepitaxial growth of α-Fe2O3, γ-Fe2O3 and Fe3O4 thin films by oxygen-plasma-assisted molecular beam epitaxy , 1997 .

[29]  D. Goodman,et al.  The physical and chemical properties of ultrathin oxide films. , 1997, Annual review of physical chemistry.

[30]  Deposition of Heteroepitaxial In2O3 Thin Films by Molecular Beam Epitaxy , 1998 .

[31]  G. Meng,et al.  Effect of Gd (Sm) doping on properties of ceria electrolyte for solid oxide fuel cells , 2003 .

[32]  Daihua Zhang,et al.  In2O3 nanowires as chemical sensors , 2003 .

[33]  Libo Gao,et al.  Preparation of nano-scale titania thick film and its oxygen sensitivity , 2000 .

[34]  Antonio Ficarella,et al.  Automotive application of sol–gel TiO2 thin film-based sensor for lambda measurement , 2003 .

[35]  Eric D. Wachsman,et al.  Higher conductivity Sm3+ and Nd3+ co-doped ceria-based electrolyte materials , 2008 .

[36]  G. Jung,et al.  Effect of temperature and dopant concentration on the conductivity of samaria-doped ceria electrolyte , 2002 .

[37]  Kenji Matsumoto,et al.  Synthesizing SnO2 thin films and characterizing sensing performances , 2010 .

[38]  T. Egami,et al.  Lattice Defects and Oxygen Storage Capacity of Nanocrystalline Ceria and Ceria-Zirconia , 2000 .

[39]  G. Korotcenkov,et al.  SnO2-Based Thin Film Gas Sensors with Functionalized Surface , 2010 .

[40]  Takafumi Yao,et al.  Structural and magnetic properties of Mn3O4 films grown on MgO(001) substrates by plasma-assisted MBE , 2000 .

[41]  J. Fergus Electrolytes for solid oxide fuel cells , 2006 .

[42]  Wolfgang Göpel,et al.  New materials and transducers for chemical sensors , 1994 .

[43]  G. Korotcenkov Metal oxides for solid-state gas sensors: What determines our choice? , 2007 .

[44]  Zhong Lin Wang,et al.  Tin oxide nanosensor fabrication using AC dielectrophoretic manipulation of nanobelts , 2005 .

[45]  David E. Williams,et al.  Tin dioxide gas sensors. Part 1.—Aspects of the surface chemistry revealed by electrical conductance variations , 1987 .

[46]  Athena Tsetsekou,et al.  Deposition of nanophase doped-ceria systems on ceramic honeycombs for automotive catalytic applications , 2000 .

[47]  M. Khakani,et al.  Microstructure and physical properties of nanostructured tin oxide thin films grown by means of pulsed laser deposition , 2002 .

[48]  J. Giber,et al.  Auger and SIMS study of segregation and corrosion behaviour of some semiconducting oxide gas-sensor materials , 1994 .

[49]  Prabir K. Dutta,et al.  Oxygen sensors: Materials, methods, designs and applications , 2003 .

[50]  S. Chambers,et al.  MBE growth and characterization of epitaxial TiO2 and Nb-doped TiO2 films , 1996 .

[51]  J. Kašpar,et al.  Bulk reduction and oxygen migration in the ceria-based oxides , 2000 .

[52]  K. Eguchi Ceramic materials containing rare earth oxides for solid oxide fuel cell , 1997 .

[53]  P. Blau,et al.  The influence of microstructure on tribological properties of WO3 thin films , 1999 .

[54]  Piotr Jasinski,et al.  Nanocrystalline undoped ceria oxygen sensor , 2003 .

[55]  Ichiro Matsubara,et al.  Resistive oxygen gas sensors based on Ce1−xZrxO2 nano powder prepared using new precipitation method , 2005 .

[56]  W. C. Maskell,et al.  Inorganic solid state chemically sensitive devices: electrochemical oxygen gas sensors , 1987 .

[57]  Haitao Huang,et al.  The effects of annealing temperature on the sensing properties of low temperature nano-sized SrTiO3 oxygen gas sensor , 2005 .

[58]  Ghenadii Korotcenkov,et al.  Gas Response Control Through Structural and Chemical Modification of Metal Oxide Films: State of the Art and Approaches , 2005 .

[59]  W. D. de Heer,et al.  Carbon Nanotubes--the Route Toward Applications , 2002, Science.

[60]  F. Yubero,et al.  Microstructure and transport properties of ceria and samaria doped ceria thin films prepared by EBE–IBAD , 2007 .

[61]  E. Kenik,et al.  Defects and morphology of tungsten trioxide thin films , 2002 .

[62]  Zu Rong Dai,et al.  Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation , 2003 .

[63]  P. Cho,et al.  Improvement of dynamic gas sensing behavior of SnO2 acicular particles by microwave calcination , 2007 .

[64]  E. Altman,et al.  Growth of MoO3 films by oxygen plasma assisted molecular beam epitaxy , 2002 .

[65]  J. Speck,et al.  Plasma-assisted molecular beam epitaxy and characterization of SnO2 (101) on r-plane sapphire , 2008 .

[66]  K. Park,et al.  Growth of ZnO single crystal thin films on c-plane (0 0 0 1) sapphire by plasma enhanced molecular beam epitaxy , 1997 .

[67]  Zhaoying Zhou,et al.  Controlled assembly of zinc oxide nanowires using dielectrophoresis , 2007 .

[68]  János Mizsei,et al.  Experimental studies of O2–SnO2 surface interaction using powder, thick films and monocrystalline thin films , 2005 .

[69]  J. Zhan,et al.  Fabrication and Gas‐Sensing Properties of Porous ZnO Nanoplates , 2008 .

[70]  J. Speck,et al.  Plasma-assisted molecular beam epitaxy of SnO2 on TiO2 , 2008 .

[71]  W. Göpel,et al.  Defect structure and sensing mechanism of SnO2 gas sensors: Comparative electrical and spectroscopic studies , 1988 .

[72]  G G Guilbault,et al.  Use of oxygen sensors to non-destructively measure the oxygen content in modified atmosphere and vacuum packed beef: impact of oxygen content on lipid oxidation. , 2002, Meat science.

[73]  W. J. Weber,et al.  The ion beam materials analysis laboratory at the environmental molecular sciences laboratory , 1999 .

[74]  A. Hårsta,et al.  Gas sensing properties of epitaxial SnO2 thin films prepared by atomic layer deposition , 2003 .

[75]  T. Wen,et al.  AC Impedance Investigation of Samarium-Doped Ceria , 2001 .

[76]  Joachim Goschnick,et al.  A gradient microarray electronic nose based on percolating SnO(2) nanowire sensing elements. , 2007, Nano letters.

[77]  Kakuya Iwata,et al.  Growth of high-quality epitaxial ZnO films on α-Al2O3 , 1999 .

[78]  A. Nowick,et al.  Ionic conductivity of CeO2 with trivalent dopants of different ionic radii , 1981 .

[79]  J. Kilner Ionic conductors: feel the strain. , 2008, Nature materials.

[80]  S. Iijima Helical microtubules of graphitic carbon , 1991, Nature.

[81]  A. Kolmakov,et al.  Toward the nanoscopic "electronic nose": hydrogen vs carbon monoxide discrimination with an array of individual metal oxide nano- and mesowire sensors. , 2006, Nano letters.

[82]  P. Moseley,et al.  Solid state gas sensors , 1997 .

[83]  Suntharampillai Thevuthasan,et al.  Thickness Dependency of Thin-Film Samaria-Doped Ceria for Oxygen Sensing , 2011, IEEE Sensors Journal.

[84]  Zhong Lin Wang,et al.  Self-powered system with wireless data transmission. , 2011, Nano letters.

[85]  Hans-Joachim Freund,et al.  Metal Oxide Surfaces: Electronic Structure and Molecular Adsorption , 1995 .

[86]  Ahsanulhaq Qurashi,et al.  Ultra-fast Microwave Synthesis of ZnO Nanowires and their Dynamic Response Toward Hydrogen Gas , 2009, Nanoscale research letters.

[87]  R. Egdell,et al.  Investigation of the growth of In2O3 on Y-stabilized ZrO2(100) by oxygen plasma assisted molecular beam epitaxy , 2009 .

[88]  Sanjay Mathur,et al.  Miniaturized ionization gas sensors from single metal oxide nanowires. , 2011, Nanoscale.

[89]  M. Engelhard,et al.  Growth and characterization of highly oriented gadolinia-doped ceria (111) thin films on zirconia (111)/sapphire (0001) substrates , 2008 .

[90]  M. Engelhard,et al.  Growth and structure of epitaxial Ce0.8Sm0.2O1.9 by oxygen-plasma-assisted molecular beam epitaxy , 2008 .

[91]  Y. Yoon,et al.  Structural, electrical, and optical properties of SnO2 nanocrystalline thin films grown on p-InSb (111) substrates , 2001 .

[92]  S. Licoccia,et al.  Fabrication and Electrochemical Properties of Epitaxial Samarium‐Doped Ceria Films on SrTiO3‐Buffered MgO Substrates , 2009 .

[93]  Ichiro Matsubara,et al.  Evaluation of response characteristics of resistive oxygen sensors based on porous cerium oxide thick film using pressure modulation method , 2006 .

[94]  R. Grimes,et al.  Defect cluster formation in M2O3-doped CeO2 , 1999 .

[95]  I. Lyubinetsky,et al.  Crystallographic dependence of visible-light photoactivity in epitaxial TiO2-xNx anatase and rutile , 2009 .

[96]  K. Kawamura,et al.  Molecular dynamics calculations on ceria-based solid electrolytes with different radius dopants , 2000 .

[97]  J. Eckstein,et al.  T linearity of in-plane resistivity in Bi 2 Sr 2 Ca Cu 2 O 8 + δ thin films , 2005 .

[98]  Helmut Geistlinger,et al.  Electron theory of thin-film gas sensors , 1993 .

[99]  Ping Wang,et al.  Ultraviolet-assisted gas sensing: A potential formaldehyde detection approach at room temperature based on zinc oxide nanorods , 2009 .

[100]  Qingyi Pan,et al.  Grain size control and gas sensing properties of ZnO gas sensor , 2000 .

[101]  Matteo Ferroni,et al.  Single crystal ZnO nanowires as optical and conductometric chemical sensor , 2007 .

[102]  S. Peacor,et al.  REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION STUDY OF THE GROWTH OF NIO AND COO THIN-FILMS BY MOLECULAR-BEAM EPITAXY , 1994 .

[103]  P. Janeček,et al.  Epitaxial growth of SnO2 film on Sn-doped TiO2(110) , 2009 .

[104]  Joan Daniel Prades,et al.  Harnessing self-heating in nanowires for energy efficient, fully autonomous and ultra-fast gas sensors , 2010 .

[105]  S. Chambers Epitaxial growth and properties of thin film oxides , 2000 .

[106]  Growth of vertically aligned single crystal ZnO nanotubes by plasma-molecular beam epitaxy , 2006 .

[107]  U. Diebold,et al.  The surface and materials science of tin oxide , 2005 .

[108]  David P. Norton,et al.  Hydrogen and ozone gas sensing using multiple ZnO nanorods , 2005 .

[109]  R. Klie,et al.  Growth of anatase films on vicinal and flat LaAlO3 (110) substrates by oxygen plasma assisted molecular beam epitaxy , 2005 .

[110]  N. Bârsan,et al.  Conduction Model of Metal Oxide Gas Sensors , 2001 .

[111]  R. Brook,et al.  A study of oxygen ion conductivity in doped non-stoichiometric oxides , 1982 .

[112]  Yoshinori Hatanaka,et al.  Ga2O3 thin film for oxygen sensor at high temperature , 2001 .

[113]  Y. Hatanaka,et al.  Presumption and improvement for gallium oxide thin film of high temperature oxygen sensors , 2003 .

[114]  Yen‐Pei Fu,et al.  Preparation and Characterization of Samaria‐Doped Ceria Electrolyte Materials for Solid Oxide Fuel Cells , 2007 .

[115]  Pekka Kuivalainen,et al.  Gas sensing properties of SnO2 thin films grown by MBE , 2006 .

[116]  Rui Zhang,et al.  Preparation and electrical properties of electrospun tin-doped indium oxide nanowires , 2007, Nanotechnology.

[117]  Ralf Moos,et al.  Materials for temperature independent resistive oxygen sensors for combustion exhaust gas control , 2000 .

[118]  D. Frankel,et al.  Controlled growth of WO3 films , 1997 .

[119]  Giorgio Sberveglieri,et al.  Recent developments in semiconducting thin-film gas sensors , 1995 .

[120]  F. Ren,et al.  Nucleation control for ZnO nanorods grown by catalyst-driven molecular beam epitaxy , 2007 .

[121]  M. Engelhard,et al.  Performance evaluation of an oxygen sensor as a function of the Samaria doped ceria film thickness , 2009 .

[122]  Joondong Kim,et al.  Inkjet printing of single-walled carbon nanotubes and electrical characterization of the line pattern , 2008, Nanotechnology.

[123]  Richard E. Cavicchi,et al.  The growth of thin, epitaxial SnO2 films for gas sensing applications , 1991 .

[124]  Richard E. Cavicchi,et al.  Ultrathin heteroepitaxial SnO2 films for use in gas sensors , 1993 .

[125]  H. Yahiro,et al.  Oxygen ion conductivity of the ceria-samarium oxide system with fluorite structure , 1988 .

[126]  Nicola Donato,et al.  CO gas sensing of ZnO nanostructures synthesized by an assisted microwave wet chemical route , 2009 .

[127]  Ichiro Matsubara,et al.  Development of Resistive Oxygen Sensors Based on Cerium Oxide Thick Film , 2004 .

[128]  U. Diebold,et al.  Pure and cobalt-doped SnO2(101) films grown by molecular beam epitaxy on Al2O3 , 2005 .

[129]  S. Morrison,et al.  Mechanism of semiconductor gas sensor operation , 1987 .

[130]  Y. Mortazavi,et al.  Semiconducting metal oxides as electrode material for YSZ-based oxygen sensors , 2009 .

[131]  A. Kovalevsky,et al.  Ceria-based materials for solid oxide fuel cells , 2001 .

[132]  Martin Moskovits,et al.  Detection of CO and O2 Using Tin Oxide Nanowire Sensors , 2003 .

[133]  P. Janeček,et al.  Epitaxial growth of tin oxide film on TiO2(1 1 0) using molecular beam epitaxy , 2010 .

[134]  S. Pearton,et al.  Growth of ZnO Thin Films on C-Plane AL2O3 by Molecular Beam Epitaxy Using Ozone as an Oxygen Source , 2006 .

[135]  D. Goodman,et al.  Epitaxial growth of ultrathin Al2O3 films on Ta(110) , 1994 .

[136]  Shih-Chia Chang Oxygen chemisorption on tin oxide: Correlation between electrical conductivity and EPR measurements , 1980 .

[137]  Rashmi,et al.  Gas sensing properties of nanocrystalline SnO2 prepared in solvent media using a microwave assisted technique , 2007 .

[138]  Mukesh Kumar,et al.  Tunable synthesis of indium oxide octahedra, nanowires and tubular nanoarrow structures under oxidizing and reducing ambients , 2009, Nanotechnology.

[139]  K. Zakrzewska,et al.  TiO2–SnO2 system for gas sensing—Photodegradation of organic contaminants , 2007 .

[140]  Sunil K. Srivastava,et al.  Sensing mechanism in tin oxide-based thick-film gas sensors , 1994 .

[141]  Dae‐Joon Kim,et al.  Lattice Parameters, Ionic Conductivities, and Solubility Limits in Fluorite‐Structure MO2 Oxide [M = Hf4+, Zr4+, Ce4+, Th4+, U4+] Solid Solutions , 1989 .

[142]  Dmitri B. Papkovsky,et al.  New oxygen sensors and their application to biosensing , 1995 .

[143]  R. Lad Heteroepitaxy of tungsten oxide films on sapphire and silicon for chemiresistive sensor applications , 2002, Proceedings of IEEE Sensors.

[144]  S. Morrison,et al.  Semiconductor gas sensors , 1985 .

[145]  Desheng Jiang,et al.  Zinc oxide nanorod and nanowire for humidity sensor , 2005 .

[146]  S. Chambers,et al.  Growth of β-MnO2 films on TiO2(110) by oxygen plasma assisted molecular beam epitaxy , 1999 .

[147]  R. Franchy Growth of thin, crystalline oxide, nitride and oxynitride films on metal and metal alloy surfaces , 2000 .

[148]  A. Goldman Oxide heterostructures grown by molecular beam epitaxy: Spin injection in superconductors and magnetic coupling phenomena , 2006 .

[149]  B. D. Kay,et al.  Model catalyst studies with single crystals and epitaxial thin oxide films , 1999 .

[150]  D. Frankel,et al.  In situ four-point conductivity and Hall effect apparatus for vacuum and controlled atmosphere measurements of thin film materials , 2002 .

[151]  J. Ha,et al.  Controlled direct patterning of V2O5 nanowires onto SiO2 substrates by a microcontact printing technique , 2006 .

[152]  Luca Francioso,et al.  SOLID STATE GAS SENSORS: STATE OF THE ART AND FUTURE ACTIVITIES , 2003 .

[153]  Duk-Dong Lee,et al.  Sensing characteristics of epitaxially-grown tin oxide gas sensor on sapphire substrate , 2001 .

[154]  Robert J. Lad,et al.  Stoichiometry and microstructure effects on tungsten oxide chemiresistive films , 2001 .

[155]  M. Madou,et al.  Chemical Sensing With Solid State Devices , 1989 .

[156]  D. Lamas,et al.  Enhanced Ionic Conductivity in Nanostructured, Heavily Doped Ceria Ceramics , 2006 .

[157]  Zhong Lin Wang,et al.  Nanobelts of Semiconducting Oxides , 2001, Science.

[158]  W. Shin,et al.  The effect of hafnia doping on the resistance of ceria for use in resistive oxygen sensors , 2007 .

[159]  C. Henager,et al.  Morphology, orientation relationship, and stability analysis of Cu2O nanoclusters on SrTiO3 (100) , 2009 .