论文信息 - Development of a fabrication technology for double-sided AC-coupled silicon microstrip detectors

Development of a fabrication technology for double-sided AC-coupled silicon microstrip detectors

Abstract We report on the development of a fabrication technology for double-sided, AC-coupled silicon microstrip detectors for tracking applications. Two batches of detectors with good electrical figures and a low defect rate were successfully manufactured at IRST Laboratory. The processing techniques and the experimental results obtained from these detector prototypes are presented and discussed.

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