X-ray reflectivity and scanning-tunneling-microscope study of kinetic roughening of sputter-deposited gold films during growth.

An in situ x-ray reflectivity study of the dynamic evolution of a growing interface was carried out for gold sputter-deposited onto a polished silicon substrate. X-ray reflectivity data were recorded during growth for thicknesses of the gold film ranging from 50 to 3500 A. A progressive kinetic roughening of the gold-vacuum interface was observed and the time-dependent interfacial width exhibits a power-law behavior. Aided by scanning-tunneling-microscopy measurements the scaling exponents were determined and compared with theoretical studies