Boron-enhanced diffusion of boron from ultralow-energy ion implantation
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A. T. Fiory | D. J. Eaglesham | Aditya Agarwal | T. E. Haynes | H. Gossmann | D. Eaglesham | S. B. Herner | A. Fiory | H.-J. L. Gossmann | A. Agarwal
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