Titanium dioxide thin films for high temperature gas sensors

Abstract Titanium dioxide (TiO2) thin film gas sensors were fabricated via the sol–gel method from a starting solution of titanium isopropoxide dissolved in methoxyethanol. Spin coating was used to deposit the sol on electroded aluminum oxide (Al2O3) substrates forming a film 1 μm thick. The influence of crystallization temperature and operating temperature on crystalline phase, grain size, electronic conduction activation energy, and gas sensing response toward carbon monoxide (CO) and methane (CH4) was studied. Pure anatase phase was found with crystallization temperatures up to 800 °C, however, rutile began to form by 900 °C. Grain size increased with increasing calcination temperature. Activation energy was dependent on crystallite size and phase. Sensing response toward CO and CH4 was dependent on both calcination and operating temperatures. Films crystallized at 650 °C and operated at 450 °C showed the best selectivity toward CO.

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