Multi-dofs MEMS displacement sensors based on the Stewart platform theory

This work proposes a new detection strategy suitable for MEMS sensors with up to 6 degrees of freedom. Parallel structures based on the Stewart theory are commonly adopted as actuators in many fields such as high precision manipulators, aircraft and vibration simulators and machine tools; the same configuration was used here to define the kinematics of a displacement sensor in the microscale based on the optical detection. The algorithm for the estimation of absolute positions and orientations of the platform is presented. The described sensing approach considerably simplifies the platform architecture and design and introduces a promising solution for many MEMS sensors and devices.

[1]  Andrea Mura,et al.  Six d.o.f. displacement measuring device based on a modified Stewart platform , 2011 .

[2]  Gursel Alici,et al.  Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation , 2009 .

[3]  Jadran Lenarčič,et al.  Advances in robot kinematics : analysis and design , 2008 .

[4]  B. Y. Duan,et al.  Singularity analysis of fine-tuning Stewart platform for large radio telescope using genetic algorithm , 2003 .

[5]  Dan Zhang,et al.  Parallel Robotic Machine Tools , 2009 .

[6]  Kenneth J. Waldron,et al.  Direct kinematic solution of a Stewart platform , 1990, IEEE Trans. Robotics Autom..

[7]  Hyo-Jin Nam,et al.  PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage , 2001 .

[8]  Jean-Pierre Merlet,et al.  Parallel Robots , 2000 .

[9]  Isaak D. Mayergoyz,et al.  The science of hysteresis , 2005 .

[10]  Y. Gianchandani,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering a Micromachined 2d Positioner with Electrothermal Actuation and Sub-nanometer Capacitive Sensing , 2022 .

[11]  M. Esashi,et al.  Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors , 2006 .

[12]  M. Esashi,et al.  Piezoactuator-integrated monolithic microstage with six degrees of freedom , 2005, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[13]  Robert Puers,et al.  Capacitive sensors: When and how to use them☆ , 1993 .

[14]  S. O. R. Moheimani,et al.  Charge driven piezoelectric actuators for structural vibration control: issues and implementation , 2005 .

[15]  Massimo Sorli,et al.  Six-axis reticulated structure force/torque sensor with adaptable performances , 1995 .

[16]  Jong Up Jeon,et al.  Electromagnetic micro x-y stage with very thick Cu coil for probe-based mass data storage device , 2001, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[17]  D. Croft,et al.  Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application , 2001 .

[18]  D. Stewart,et al.  A Platform with Six Degrees of Freedom , 1965 .

[19]  Tian Jian Lu,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering Mems Actuators and Sensors: Observations on Their Performance and Selection for Purpose , 2022 .

[20]  Ren C. Luo,et al.  Design and implementation of capacitive proximity sensor using microelectromechanical systems technology , 1998, IEEE Trans. Ind. Electron..

[21]  Gijsbertus J.M. Krijnen,et al.  A micromachined capacitive incremental position sensor: part 2. Experimental assessment , 2006 .