Few electron devices: towards hybrid CMOS-SET integrated circuits

In this paper, CMOS evolution and their fundamental and practical limitations are briefly reviewed, and the working principles, performance, and fabrication of single-electron transistors (SETs) are addressed in detail. Some of the unique characteristics and functionality of SETs, like unrivalled integration and low power, which are complementary to the sub-20 nm CMOS, are demonstrated. Characteristics of two novel SET architectures, namely, C-SET and R-SET, aimed at logic applications are compared. Finally, it is shown that combination of CMOS and SET in hybrid ICs appears to be attractive in terms of new functionality and performance, together with better integrability for ULSI, especially because of their complementary characteristics. It is envisioned that efforts in terms of compatible fabrication processes, packaging, modeling, electrical characterization, co-design and co-simulation will be needed in the near future to achieve substantial advances in both memory and logic circuit applications based on CMOS-SET hybrid circuits.

[1]  Konstantin K. Likharev,et al.  Single Electronics: A Correlated Transfer of Single Electrons and Cooper Pairs in Systems of Small Tunnel Junctions , 1991 .

[2]  Kenji Taniguchi,et al.  Monte Carlo Study of Single-Electronic Devices , 1994 .

[3]  Korotkov Single-electron transistor controlled with a RC circuit. , 1994, Physical review. B, Condensed matter.

[4]  Korotkov An,et al.  Single-electron transistor controlled with a RC circuit. , 1994 .

[5]  James D. Meindl,et al.  Low power microelectronics: retrospect and prospect , 1995, Proc. IEEE.

[6]  A. Korotkov Wireless single‐electron logic biased by alternating electric field , 1995 .

[7]  Sandip Tiwari,et al.  A silicon nanocrystals based memory , 1996 .

[8]  Konstantin K. Likharev,et al.  Single‐electron transistor logic , 1996 .

[9]  James D. Meindl A history of low power electronics: how it began and where it's headed , 1997, ISLPED '97.

[10]  H. Wong,et al.  CMOS scaling into the nanometer regime , 1997, Proc. IEEE.

[11]  Siegfried Selberherr,et al.  SIMON-A simulator for single-electron tunnel devices and circuits , 1997, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[12]  Konstantin K. Likharev,et al.  Single-electron devices and their applications , 1999, Proc. IEEE.

[13]  Kazuo Yano,et al.  Single-electron memory for giga-to-tera bit storage , 1999, Proc. IEEE.

[14]  Yun Seop Yu,et al.  Macromodeling of single-electron transistors for efficient circuit simulation , 1999 .

[15]  Mark S. Lundstrom,et al.  Essential physics of carrier transport in nanoscale MOSFETs , 2000, 2000 International Conference on Simulation Semiconductor Processes and Devices (Cat. No.00TH8502).

[16]  K. Matsuzawa,et al.  Analytical Single-Electron Transistor(SET)Model for Design and Analysis of Realistic SET Circuits , 2000 .

[17]  M. Jurczak,et al.  Silicon-on-Nothing (SON)-an innovative process for advanced CMOS , 2000 .

[18]  G. Guegan,et al.  Coulomb blockade in low-mobility nanometer size Si MOSFET’s , 2000 .

[19]  Ken Uchida,et al.  Room-temperature operation of multifunctional single-electron transistor logic , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

[20]  James D. Plummer Silicon MOSFETs (conventional and non-traditional) at the scaling limit , 2000, 58th DRC. Device Research Conference. Conference Digest (Cat. No.00TH8526).

[21]  Konstantin K. Likharev,et al.  Riding the crest of a new wave in memory [NOVORAM] , 2000 .

[22]  U. Langmann,et al.  Short-channel vertical sidewall MOSFETs , 2001 .

[23]  M. Haond,et al.  First 80 nm SON (Silicon-On-Nothing) MOSFETs with perfect morphology and high electrical performance , 2001, International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224).

[24]  Hiroshi Inokawa,et al.  A multiple-valued single-electron SRAM by the PADOX process , 2001, 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443).

[25]  C. Wasshuber Computational Single-Electronics , 2001 .

[26]  H. Inokawa,et al.  A multiple-valued logic with merged single-electron and MOS transistors , 2001, International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224).

[27]  R. Schaller,et al.  Technological innovation in the semiconductor industry: A case study of the International Technology Roadmap for Semiconductors (ITRS) , 2001, PICMET '01. Portland International Conference on Management of Engineering and Technology. Proceedings Vol.1: Book of Summaries (IEEE Cat. No.01CH37199).

[28]  Kaustav Banerjee,et al.  A SET quantizer circuit aiming at digital communication system , 2002, 2002 IEEE International Symposium on Circuits and Systems. Proceedings (Cat. No.02CH37353).

[29]  A. Toriumi,et al.  Programmable single-electron transistor logic for low-power intelligent Si LSI , 2002, 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315).

[30]  A.M. Ionescu,et al.  A quasi-analytical SET model for few electron circuit simulation , 2002, IEEE Electron Device Letters.

[31]  J. G. Fossum,et al.  Analytical modeling of quantization and volume inversion in thin Si-film DG MOSFETs , 2002 .

[32]  J. Autran,et al.  Two-dimensional modeling of quantum ballistic transport in ultimate double-gate SOI devices , 2003 .

[33]  Akira Fujiwara,et al.  Silicon single-electron devices and their applications , 2004, Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004..