A Monitoring System of GaN Growth Process

A monitoring system of GaN growth process is introduced. Data acquisition modules, main temperature-controller and flowmeters are connected with standard RS-485 bus to compose the RS-485 network. Gas flow rates are set by the output voltage of D/A board. Vacuometers and assistant temperature-controller are connected with serial ports. Acquisition, displaying, controlling, setting, alarming, and printing of variables in the process are implemented in system program