A square-plate piezoelectric linear motor operating in two orthogonal and isomorphic face-diagonal-bending modes

We report a piezoelectric linear motor made of a single Pb(Zr,Ti)O3 square-plate, which operates in two orthogonal and isomorphic face-diagonal-bending modes to produce precision linear motion. A 15 × 15 × 2 mm prototype was fabricated, and the motor generated a driving force of up to 1.8 N and a speed of 170 mm/s under an applied voltage of 100 Vpp at the resonance frequency of 136.5 kHz. The motor shows such advantages as large driving force under relatively low driving voltage, simple structure, and stable motion because of its isomorphic face-diagonal-bending mode.

[1]  Xiaoning Jiang,et al.  A small, linear, piezoelectric ultrasonic cryomotor , 2005 .

[2]  Sun-Kyu Lee,et al.  Nano Positioning of a High Power Ultrasonic Linear Motor , 2008 .

[3]  R. Bansevicius,et al.  Multi-degree-of-freedom ultrasonic motors for mass-consumer devices , 2008 .

[4]  Shuxiang Dong,et al.  A square-plate ultrasonic linear motor operating in two orthogonal first bending modes , 2013, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[5]  Kenji Uchino.  Piezoelectric ultrasonic motors: overview , 1998 .

[6]  J.T. Leinvuo,et al.  Flextensional ultrasonic piezoelectric micro-motor , 2006, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[7]  James Friend,et al.  Piezoelectric ultrasonic bidirectional linear actuator for micropositioning fulfilling Feynman's criteria , 2008 .

[8]  Chunsheng Zhao,et al.  Simple new ultrasonic piezoelectric actuator for precision linear positioning , 2012, Journal of Electroceramics.

[9]  Garnett C. Horner,et al.  A linear piezoelectric motor , 1998 .

[10]  Siak Piang Lim,et al.  A modified ultrasonic linear motor , 2000 .

[11]  Burhanettin Koc,et al.  Piezoelectric actuator for mobile auto focus camera applications , 2009 .

[12]  Shuxiang Dong,et al.  A high-temperature double-mode piezoelectric ultrasonic linear motor , 2012 .

[13]  Shuxiang Dong,et al.  A double B1-mode 4-layer laminated piezoelectric linear motor , 2012, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

[14]  Paul Gonnard,et al.  A multilayer TWILA ultrasonic motor , 2009 .

[15]  O. Vyshnevsky,et al.  A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[16]  Shuxiang Dong,et al.  REVIEW ON PIEZOELECTRIC, ULTRASONIC, AND MAGNETOELECTRIC ACTUATORS , 2012 .

[17]  Siak Piang Lim,et al.  A design of an ultrasonic linear motor based on theoretical analysis , 2000 .

[18]  P. Laoratanakul,et al.  Design and performance testing of an ultrasonic linear motor with dual piezoelectric actuators , 2012, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.