论文信息 - Azimuthal ion movement in HiPIMS plasmas—part I: velocity distribution function - 字舞流文

Azimuthal ion movement in HiPIMS plasmas—part I: velocity distribution function

A. Keudell | V. S. Gathen | J. Held | A. von Keudell | V. Schulz-von der Gathen | S. Thiemann-Monjé | S. Schuttler | S. Thiemann-Monj'e | Steffen Schüttler