Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

This paper performs a detailed investigation on the electromagnetic angle sensor integrated in the flame retardant 4 (FR4)-based scanning micromirror. An accurate theoretical model is presented, especially considering the coupling effect between the driving and sensing coils. Experimental results agree well with the theoretical results, and show a sensitivity of 55.0 mVp/° and a high signal-to-noise ratio (SNR) of 71.9 dB. Moreover, the linearity of the angle sensor can still reach 0.9995, though it is affected slightly by the coupling effect. Finally, the sensor’s good feasibility for feedback control has been further verified through a simple closed-loop control circuit. The micromirror operated with closed-loop control possesses better long-term stability and temperature stability than that operated without closed-loop control.

[1]  Wei Wang,et al.  Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers , 2016, Journal of Microelectromechanical Systems.

[2]  Y. Isono,et al.  Fatigue Life Prediction Criterion for Micro–Nanoscale Single-Crystal Silicon Structures , 2009, Journal of Microelectromechanical Systems.

[3]  Jian Huang,et al.  Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating , 2018, Micromachines.

[4]  C. Niclass,et al.  System Design and Performance Characterization of a MEMS-Based Laser Scanning Time-of-Flight Sensor Based on a 256 $\times$ 64-pixel Single-Photon Imager , 2013, IEEE Photonics Journal.

[5]  Zheng You,et al.  Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector , 2010, Sensors.

[6]  Hui Zuo,et al.  FPCB Micromirror-Based Laser Projection Availability Indicator , 2016, IEEE Transactions on Industrial Electronics.

[7]  Huikai Xie,et al.  Optical coherence tomography endoscopic probe based on a tilted MEMS mirror. , 2016, Biomedical optics express.

[8]  Arda D. Yalcinkaya,et al.  Polymer magnetic scanners for bar code applications , 2007 .

[9]  Jian Huang,et al.  An electromagnetic scanning mirror integrated with blazed grating and angle sensor for a near infrared micro spectrometer , 2017 .

[10]  Siyuan He,et al.  FPCB Ring-Square Electrode Sandwiched Micromirror-Based Laser Pattern Pointer , 2017, IEEE Transactions on Industrial Electronics.

[11]  Xiaojing J Zhang,et al.  Magnetic-Actuated Stainless Steel Scanner for Two-Photon Hyperspectral Fluorescence Microscope , 2014, Journal of Microelectromechanical Systems.

[12]  K. Hane,et al.  Nonlinear spring effect of tense thin-film torsion bar combined with electrostatic driving , 2013 .

[13]  Jun-Sik Hwang,et al.  Slow scanning electromagnetic scanner for laser display , 2008 .

[14]  Fan Yu,et al.  FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor , 2018, Micromachines.

[15]  R. Sawada,et al.  Temperature dependence of the scanning performance of an electrostatic microscanner , 2016 .

[16]  Siyuan He,et al.  Double stage FPCB scanning micromirror for laser line generator , 2018 .

[17]  H. Urey,et al.  Electromagnetically Actuated FR4 Scanners , 2008, IEEE Photonics Technology Letters.

[18]  Zheng You,et al.  Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application , 2017, Micromachines.

[19]  Wei Wang,et al.  Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror. , 2016, Optics express.

[20]  Masahiro Sato,et al.  Motion Monitoring of MEMS Actuator with Electromagnetic Induction , 2014 .

[21]  Y. Manoli,et al.  Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors , 2016, SPIE OPTO.

[22]  K. Hane,et al.  Piezoresistive Rotation Angle Sensor Integrated in Micromirror , 2006 .

[23]  Caglar Ataman,et al.  Compact Fourier transform spectrometers using FR4 platform , 2009 .

[24]  Masayoshi Esashi,et al.  A large-scan-angle piezoelectric MEMS optical scanner actuated by a Nb-doped PZT thin film , 2014 .