论文信息 - Multi-user hybrid process platform for MEMS devices using silicon-on-insulator wafers - 字舞流文

Multi-user hybrid process platform for MEMS devices using silicon-on-insulator wafers

R. M. Boysel | P. Lin | J. Kubby | M. Boysel | M. Winters | W. Hawkins | P. Gulvin | J. Diehl | K. Feinberg | K. German | L. Herko | N. Jia | J. Ma | J. Meyers | P. Nystrom | Y.R. Wang | J. Ma