Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

The effects of annealing on the material characteristics of a diamond-like carbon (DLC) thin film fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) were investigated. The elementary analysis, using Rutherford backscattering spectrometry and elastic recoil detection analysis, and measurement of hardness and Young's modulus, using a nanoindentation technique, were performed on the FIB-CVD DLC thin film by annealing for 1 h in the temperature range from room temperature to 1273 K. Elementary analysis indicated that the Ga content in the FIB-CVD DLC film used as an ion source began to decrease considerably at 523 K and the H content also began to decrease at 773 K. On the other hand, the hardness and Young's modulus of the FIB-CVD DLC film were found to decrease beyond 773 K. This decrease in hardness is ascribed to the variation in H content rather than in Ga content in the film.

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