Aluminium Nitride thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications

Y.Q. Fu1, J. S. Cherng2, J. K. Luo3, M.P.Y. Desmulliez1, Y. Li4, A. J. Walton4 and F. Placido5 1School of Engineering and Physical Sciences, Institute of Integrated Systems, Heriot-Watt University, Edinburgh, EH14 4AS, 2Department of Materials Engineering, Mingchi University of Technology, Taishan, Taipei, 3Centre for Material Research and Innovation, University of Bolton, Deane Road, Bolton, BL3 5AB, 4 Scottish Microelectronics Centre, School of Engineering, Institute of Integrated Systems, University of Edinburgh, Edinburgh, EH10 7AT, 5Thin Film Centre, University of the West of Scotland, Paisley, PA1 2BE, 1,3,4,5UK 2Taiwan