Basic concept of feature-based metrology

Abstract In coordinate metrology, an associated feature (or the Gaussian associated feature) is calculated from an extracted feature that is determined by a measured data set of a CMM (coordinate measuring machine) on a real feature using the least squares method. This data processing flow, which is called ‘feature-based metrology’ disagrees with the data processing methods in profile metrology and length measurement. In this report, the basic concepts of feature-based metrology are discussed, such as feature modeling, the least squares method and the statistical estimation of the uncertainty of measurement. Theoretical analysis and simulations for feature-based metrology in statistical ways directly imply that the basic concepts and data processing methods in this report are useful in estimating the uncertainty of measurement in coordinate metrology.