Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy.
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C. Detavernier | R. Vos | Matthias M. Minjauw | J. Dendooven | M. Van Daele | E. Solano | E. Levrau | Sofie S. T. Vandenbroucke