Indium oxide diffusion barriers for Al/Si metallizations
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M. Nicolet | C. Garland | E. Kolawa | J. Molarius | L. Tran | C. Nieh | W. Flick | J.C.S. Wei
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M. Nicolet | C. Garland | E. Kolawa | J. Molarius | L. Tran | C. Nieh | W. Flick | J.C.S. Wei