论文信息 - Thermophysical properties of low-residual stress, Silicon-rich, LPCVD silicon nitride films - 字舞流文

Thermophysical properties of low-residual stress, Silicon-rich, LPCVD silicon nitride films

Yu-Chong Tai | Carlos H. Mastrangelo | Richard S. Muller | R. Muller | Y. Tai | C. Mastrangelo

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