论文信息 - Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition - 字舞流文

Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition

F. Roozeboom | M. Verheijen | W. Kessels | B. Macco | A. Mameli | A. Mackus | B. Karasulu | B. Barcones | Bora Karasulu