LOPA-based direct laser writing of multi-dimensional and multi-functional photonic submicrostructures

We have recently developed a simple fabrication technique, called low one-photon absorption (LOPA) direct laser writing (DLW), to realize multi-dimensional and multi-functional polymer-based photonic submicrostructures. This technique employs a continuous-wave laser at 532 nm-wavelength with only few milliwatts and a simple optical setup, allowing to decrease the cost of the fabrication system by a factor of ten as compared to a commercial DLW system. In this report, we present various photonic structures, such as 2D and 3D micro- resonators, photonic and magnetic submicrostructures, and nonlinear optical structures fabricated by this LOPA- based DLW method. We also discuss about potential applications of those fabricated multi-dimensional and multi-functional photonic submicrostructures in opto-electronics, bio, as well as in opto-mechanics.

[1]  Isabelle Ledoux-Rak,et al.  Optimization of LOPA-based direct laser writing technique for fabrication of submicrometric polymer two- and three-dimensional structures , 2014, Photonics Europe.

[2]  Masud Mansuripur,et al.  Direct laser writing of electro-optic waveguide in chromophore-doped hybrid sol–gel , 2004 .

[3]  H. Al-Mumen,et al.  Characterisation of SU-8 n -doping carbon nanotube-based electronic devices , 2015 .

[4]  S. Arnold,et al.  Shift of whispering-gallery modes in microspheres by protein adsorption. , 2003, Optics letters.

[5]  Wen-Fei Dong,et al.  Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing. , 2013, Lab on a chip.

[6]  T. Crawford,et al.  Pattern transfer nanomanufacturing using magnetic recording for programmed nanoparticle assembly , 2012, Nanotechnology.

[7]  L. Maleki,et al.  High-order tunable filters based on a chain of coupled crystalline whispering gallery-mode resonators , 2005, IEEE Photonics Technology Letters.

[8]  N. D. Lai,et al.  Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing. , 2013, Optics express.

[9]  Peter Vettiger,et al.  High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS , 1998 .

[10]  Preecha P. Yupapin,et al.  High-capacity terahertz carrier generation using a modified add-drop filter for radio frequency identification , 2012 .

[11]  Howon Lee,et al.  Programming magnetic anisotropy in polymeric microactuators. , 2011, Nature materials.

[12]  T. Kippenberg,et al.  Optical frequency comb generation from a monolithic microresonator , 2007, Nature.

[13]  Henri Benisty,et al.  High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing , 2014 .

[14]  Vladimir S. Ilchenko,et al.  Ultrahigh optical Q factors of crystalline resonators in the linear regime , 2006 .

[15]  V. Ramgopal Rao,et al.  Photopatternable nano-composite (SU-8/ZnO) thin films for piezo-electric applications , 2012 .

[16]  Ivo Safarik,et al.  Magnetic techniques for the isolation and purification of proteins and peptides , 2004, Biomagnetic research and technology.

[17]  Jackie Y Ying,et al.  Three-dimensional microstructured tissue scaffolds fabricated by two-photon laser scanning photolithography. , 2010, Biomaterials.

[18]  D. Hansford,et al.  Fabrication of polymer microstructures for MEMS: sacrificial layer micromolding and patterned substrate micromolding , 2007, Biomedical microdevices.

[19]  Ngoc Diep Lai,et al.  Optically Accelerated Formation of One- and Two-Dimensional Holographic Surface Relief Gratings on DR1/PMMA , 2013 .

[20]  Andrew A. Bettiol,et al.  Characterization of channel waveguides and tunable microlasers in SU8 doped with rhodamine B fabricated using proton beam writing , 2008 .

[21]  Minh Thanh Do,et al.  Coupling of a single active nanoparticle to a polymer-based photonic structure , 2016 .

[22]  Alexandre François,et al.  Polymer based whispering gallery mode laser for biosensing applications , 2015 .

[23]  M. Jakobsen,et al.  In situ SU-8 silver nanocomposites , 2015, Beilstein journal of nanotechnology.

[24]  Gary Siuzdak,et al.  Multiphoton-induced chemistry of phenol in hexane at 266 nm , 1990 .

[25]  A Ranella,et al.  Direct laser writing of 3D scaffolds for neural tissue engineering applications , 2011, Biofabrication.

[26]  J. Weingartner,et al.  Photoelectric Emission from Dust Grains Exposed to Extreme Ultraviolet and X-Ray Radiation , 2006, astro-ph/0601296.

[27]  Vladimir S. Ilchenko,et al.  Whispering-gallery-mode electro-optic modulator and photonic microwave receiver , 2003 .

[28]  B. Chichkov,et al.  Multiphoton polymerization of hybrid materials , 2010 .

[29]  T. Kippenberg,et al.  Cavity Optomechanics: Back-Action at the Mesoscale , 2008, Science.

[30]  M. Wegener,et al.  Direct laser writing of three-dimensional photonic-crystal templates for telecommunications , 2004, Nature materials.

[31]  WeiCai NUMERICAL METHODS FOR MAXWELL'S EQUATIONS IN INHOMOGENEOUS MEDIA WITH MATERIAL INTERFACES , 2004 .

[32]  Isabelle Ledoux-Rak,et al.  Three-dimensional optical addressing by ultra low one-photon absorption microscopy , 2014, Photonics Europe.

[33]  Dam Thuy Trang Nguyen,et al.  One-step fabrication of submicrostructures by low one-photon absorption direct laser writing technique with local thermal effect , 2016 .