Impact of DIBL variability on SRAM static noise margin analyzed by DMA SRAM TEG

The static noise margin (SNM) as well as V<inf>th</inf>, g<inf>m</inf>, body factor, and drain-induced-barrier-lowering (DIBL) in individual transistors in SRAM cells are directly measured by 16k bit device-matrix-array (DMA) SRAM TEG. It is found that, besides V<inf>th</inf> variability, DIBL variability degrades SRAM stability and its V<inf>dd</inf> dependence while the variability of g<inf>m</inf> and body factor has only a small effect.