Micro Seismic Power Generator Using Electret Polymer Film

In order to meet the increasing demand of power consumption of portable electronic devices, micro power generation attracts much attention. The final goal of the present study is to develop a micro power generator combined with micro thermal engine. Electrostatic induction using electret is adopted as the power generation principle. The characteristic of CYTOP as the electret material was examined and surface charge density up to 0.68 mC/m 2 is obtained. In preliminary experiment, 6 μW power generation is achieved with sinusoidal oscillation of 1 mm amplitude at 10 Hz.

[1]  Y. Tada.  Theoretical Characteristics of Generalized Electret Generator, Using POlymer Film Electrets , 1986, IEEE Transactions on Electrical Insulation.

[2]  Ding Hai,et al.  Constant-current corona charging of Teflon PFA , 1991 .

[3]  M. Figueiredo,et al.  Corona charging of electrets: models and results , 1991, [1991 Proceedings] 7th International Symposium on Electrets (ISE 7).

[4]  C. Kato,et al.  Development of Ultra Micro Gas Turbines , 2002 .

[5]  Yu-Chong Tai,et al.  Micromachined high-aspect-ratio parylene beam and its application to low-frequency seismometer , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[6]  Y. Tai,et al.  Micro electret power generator , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[7]  Alan H. Epstein,et al.  AN INFORMAL SURVEY OF POWER MEMS , 2003 .