Novel architecture for silicon-based integrated interferometer with phase modulation by elasto-optic effect

As a novelty application of Si-based integrated optics, the preliminary results of realisation of a compact Mach-Zehnder interferometer will be presented. The deposition of a piezoelectric ZnO thin-film transducer on the reftrence arm of the interferometer will allow to transform this optically passive device in a device under an active phase modulation, useful to built a high-resolution microsensing systems with optical heterodyning.