Low Resistivity Tungsten and Ruthenium through Textural Control Using Ion Beam Deposition
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M. Saghayezhian | A. Kulkarni | Rutvik J. Mehta | Jinho Kim | P. Turner | F. Cerio | Yuejing Wang | R. Caldwell
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M. Saghayezhian | A. Kulkarni | Rutvik J. Mehta | Jinho Kim | P. Turner | F. Cerio | Yuejing Wang | R. Caldwell