3-D hemispherical micro glass-shell resonator with integrated electrostatic excitation and capacitive detection transducers

This paper reports the development and performance of a 3-D hemispherical micro glass-shell resonator with integrated electrostatic excitation and capacitive detection transducers. A new fabrication method has been developed for a hemispherical micro glass-shell resonator with glass ball molding as well as a self-guided-alignment process to maintain the gap distance between the electrodes and the shell uniform. The fabricated micro glass-shell resonator produced the first vibration mode of resonance at 5.843KHz with a quality factor of 730 at atmosphere with the time decay constant of 39.78ms. The diameter of the fabricated glass-shell resonator was measured as 1mm with shell thickness of 1.2μm.

[1]  Yogesh B. Gianchandani,et al.  3D-soule: A fabrication process for large scale integration and micromachining of spherical structures , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[2]  A M Shkel,et al.  Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators , 2011, Journal of Microelectromechanical Systems.

[3]  C. Mastrangelo,et al.  Precision curved micro hemispherical resonator shells fabricated by poached-egg micro-molding , 2012, 2012 IEEE Sensors.

[4]  F. Ayazi,et al.  3-D micromachined hemispherical shell resonators with integrated capacitive transducers , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).