论文信息 - Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings - 字舞流文

Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings

P. Eklund | G. Greczynski | D. Lundin | A. le Febvrier | Sanath Kumar Honnali | Charlotte Poterie