Two-dimensional observation of excited atoms and ions and excitation temperature in inductively coupled plasma using newly developed four channel spectrovideo camera

A four-channel spectrovideo camera was developed and applied to the measurement of spatially and spectrally resolved profiles of atomic and ionic emission in an inductively coupled plasma (ICP). Spatial distributions of argon and chromium atoms and iron ions in ICP were visualized successfully. The excitation temperature profiles of argon, chromium, and iron in ICP were also successfully constructed on the basis of the two-line method. The excitation temperature profiles obtained with a monochromator and the spectrovideo camera were in fairly good agreement.Graphical Abstract

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