论文信息 - A plasma-based technique for controlled low energy ion bombardment of dielectric surfaces - 字舞流文

A plasma-based technique for controlled low energy ion bombardment of dielectric surfaces

H. Oechsner | D. Martin

[1] S. Maniv. Modeling for rf discharge characteristics , 1988 .

[2] H. Bach. Distortion of na-concentration profiles in thin glassy surface layers by ion bombardment , 1976 .

[3] H. Oechsner,et al. Electron cyclotron wave resonances and power absorption effects in electrodeless low pressure h.f. plasmas with a superimposed static magnetic field , 1974 .