论文信息 - A low loss planar waveguide by using organic-inorganic Sol-Gel

A low loss planar waveguide by using organic-inorganic Sol-Gel

An organic-inorganic hybrid sol-gel material by using Tetraethylorthosilicate(Teos) and phenyltriethoxysilane(Phtes) as precursors was synthesized, and a planar optical waveguide was fabricated by using spin-coating on silicon substrate. A rib waveguide was formed by inductively coupled plasma (ICP). A relation between refractive index and composition of the precursors was obtained by M-line method; the optical loss of the planar waveguide was measured to be 0.23dB/cm at 632.8nm wavelength. A directional coupler was also realized.

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