A pressure-balanced electrostatically-actuated microvalve
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Michael A. Huff | Martin A. Schmidt | Theresa A. Lober | M. Schmidt | M. Huff | T. Lober | Michael Mettner | M.S. Mettner
[1] W. Ko,et al. A constant flow-rate microvalve actuator based on silicon and micromachining technology , 1988, IEEE Technical Digest on Solid-State Sensor and Actuator Workshop.
[2] H. E. Merritt,et al. Hydraulic Control Systems , 1991 .
[3] M. Esashi,et al. A micro chemical analyzing system integrated on a silicon wafer , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..
[4] S. Terry,et al. A gas chromatographic air analyzer fabricated on a silicon wafer , 1979, IEEE Transactions on Electron Devices.
[5] U. Bonne,et al. Micromachined silicon microvalve , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..
[6] S. Timoshenko,et al. THEORY OF PLATES AND SHELLS , 1959 .
[7] H. Lintel,et al. A piezoelectric micropump based on micromachining of silicon , 1988 .
[8] Stephen D. Senturia,et al. Plastic Deformation of Highly Doped Silicon , 1989 .
[9] C. Plougonven,et al. Warpage of Silicon Wafers , 1980 .