A pressure-balanced electrostatically-actuated microvalve

A new microvalve structure designed to enhance the limited actuation forces available in microfabricated devices by using a pressure-balancing scheme is reported. The concept is to allow the fluid to provide a balancing force on the moving part of the device, thereby reducing the force required to open the valve. Various methods can be used to actuate the valve, but electrostatic actuation is chosen since it is readily integrated with the valve fabrication sequence. The process for implementing the valve concept uses multiple wafer bonding steps (three in the present prototype) and has yielded valves which have been successfully actuated in air using voltages below 350 V.<<ETX>>

[1]  W. Ko,et al.  A constant flow-rate microvalve actuator based on silicon and micromachining technology , 1988, IEEE Technical Digest on Solid-State Sensor and Actuator Workshop.

[2]  H. E. Merritt,et al.  Hydraulic Control Systems , 1991 .

[3]  M. Esashi,et al.  A micro chemical analyzing system integrated on a silicon wafer , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[4]  S. Terry,et al.  A gas chromatographic air analyzer fabricated on a silicon wafer , 1979, IEEE Transactions on Electron Devices.

[5]  U. Bonne,et al.  Micromachined silicon microvalve , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[6]  S. Timoshenko,et al.  THEORY OF PLATES AND SHELLS , 1959 .

[7]  H. Lintel,et al.  A piezoelectric micropump based on micromachining of silicon , 1988 .

[8]  Stephen D. Senturia,et al.  Plastic Deformation of Highly Doped Silicon , 1989 .

[9]  C. Plougonven,et al.  Warpage of Silicon Wafers , 1980 .