A reduced-order model of squeeze-film damping for deformable micromechanical structures including large displacement effects

This paper presents a reduced-order model for the Reynolds equation for deformable structure and large displacements. It is based on the model established in which is piece-wise linearized using two different methods. The advantages and drawbacks of each method are pointed out. The pull-in time of a microswitch is determined and compared to experimental and other simulation data.

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