CARBON INCORPORATION INTO SI AT HIGH CONCENTRATIONS BY ION IMPLANTATION AND SOLID PHASE EPITAXY
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S. R. Lee | James W. Mayer | S. T. Picraux | S. R. Lee | H. Stein | J. Mayer | J. Strane | J. W. Strane | Herman J. Stein | J. K. Watanabe | J. Watanabe | S. Picraux
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