论文信息 - High Performance InGaAs Gate-All-Around Nanosheet FET on Si Using Template Assisted Selective Epitaxy - 字舞流文

High Performance InGaAs Gate-All-Around Nanosheet FET on Si Using Template Assisted Selective Epitaxy

G. Cohen | C. Lavoie | V. Narayanan | J. Bruley | P. Hashemi | J. Ott | R. Mo | T. Ando | M. Frank | H. Miyazoe | H. Schmid | E. Leobandung | R. Bruce | C. D'Emic | M. Lofaro | L. Czornomaz | X. Sun | J. Patel | W. Spratt | S. Lee | C. Cheng