Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers
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Norbert Kaiser | Helmut Bernitzki | Roland Thielsch | Detlev Ristau | Klaus R. Mann | Angela Duparre | Hans Lauth | Winfried Arens | Oliver Apel | Jens Ullmann | Christoph Zaczek | Johanes Ebert | Stefan Schippel | H. Heyer
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