论文信息 - Scanning Auger electron microscopy

Scanning Auger electron microscopy

Scanning electron microscopes are now being developed to investigate the spatial distribution of chemical elements in the top few atomic layers of solids. Instruments using the Auger process are discussed here, as well as some applications to metallurgy and microelectronics

R Browning | M Prutton | R. Browning | M. Prutton

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