Two-step procedure for multi-mode MEMS resonator-based sensing of fluid properties

In this paper, a novel approach for the determination of densities and viscosities of fluids, using a multi-mode MEMS resonator, is introduced. A self-actuating/self-sensing piezoelectric MEMS-resonator is design in operated in a distinct way, so that lateral as well as transversal bending modes can be excited within one measurement cycle. This enables a unique evaluation principle based on a two-step procedure. First, a special transversal bending mode with high Q-factors in liquids (e.g. Q = 250 in viscosity standard N1 from Paragon Scientific) is used to determine the density. As a second step, the lateral mode is excited to measure the viscosity, thus achieving deviations lower than 3% compared to the nominal values.

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